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Sol-Gel (BaxSr1-x)TiO3 thin films for microelectronic applications; Filmes finos de (BaxSr1-x)TiO3 para aplicações microeléctricas

Jie Gao
Fonte: Universidade de Aveiro Publicador: Universidade de Aveiro
Tipo: Dissertação de Mestrado
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Dielectric, piezoelectric and ferroelectric thin films have been in the past years significantly studied because of their technological interest in a wide range of applications in the microelectronics industry. Among the several ferroelectric materials, compositions within the solid solution between the ferroelectric BaTiO3 and the quantum paraelectric SrTiO3 (Ba1-xSrx)TiO3 (BST), possess high dielectric constant and relatively low loss over a wide frequency range (till >1 GHz), low-leakage current density, a large electric field dielectric tunability and a composition dependent Curie temperature. These properties make BST thin films attractive for high density dynamic random access memories (DRAMs), and low cost agile microwave circuits, such as phase shifters, tunable filters, tunable matching network and high tuning frequency range voltage controlled oscillators. Moreover BST is a lead free perovskite making it an ideal material from the environmental point of view. These applications require the growth of high quality BST thin films, in addition to fundamental understanding of their structural and dielectric properties, which often diverge from those in equivalent bulk material. The high temperatures required for the crystallization of the perovskite BST films are not compatible with Si based large scale integrated circuits. SiO2 and/or metal silicides formation occurs when BST is deposited on silicon at temperatures above 700ºC. An underlying silicide layer reduces materials high dielectric permittivity...